Vertical Scanning White-Light Interferometry for Dimensional Characterization of Microelectromechanical System Devices In this thesis, a technique of scanning white-light interferometer in Michelson configuration is employed to measure and analyze the characteristics of different types of oil-film on water surface. 垂直扫描白光干涉术用于微机电系统的尺寸表征本文基于迈克尔逊干涉原理,通过扫描白光干涉装置对不同油品在水面形成的油膜的特性进行了测量和分析。